PEC Reliability in 3D E-beam DOE Nanopatterning

Number of the records: 1

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SYSNO	0451587
Title	PEC Reliability in 3D E-beam DOE Nanopatterning
Author(s)	Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Urbánek, Michal (UPT-D)_RID Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI}
Source Title	Microscopy and Microanalysis. Roč. 21, S4 (2015), s. 230-235. - : Cambridge University Press
Document Type	Článek v odborném periodiku
Grant	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	US
Keywords	proximity effect correction * diffractive optical elements
Permanent Link	http://hdl.handle.net/11104/0252722

Number of the records: 1