Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates

Number of the records: 1

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SYSNO	0450607
Title	Multitarget sputtering of piezoelectric mixed oxide thin films onto flexible substrates
Author(s)	Kleiner, A. (DE) Suchaneck, G. (DE) Dejneka, Alexandr (FZU-D)_{RID, ORCID} Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Lavrentiev, V. (RU) Kiselev, D.A. (RU) Gerlach, G. (DE)
Source Title	Oxide Materials for Electronic Engineering - Fabrication, Properties and Application, vol. 230, Solid State Phenomena. S. 3-7. - Pfaffikon : Scientific.Net, 2015 / Ubizskii S. ; Vasylechko L. ; Zhydachevskii Y.
Conference	Oxide Materials for Electronic Engineering – Fabrication, Properties and Applications (ОМЕЕ 2014), Lviv, 26.05.2014-30.05.2014
Document Type	Konferenční příspěvek (zahraniční konf.)
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	CH
Keywords	complex oxide film deposition * PZT * multitarget reactive magnetron sputtering * flexible polymer substrate * XPS * PFM
Permanent Link	http://hdl.handle.net/11104/0251878

Number of the records: 1