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The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions
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SYSNO 0440919 Title The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions Author(s) Ben-David, E. (IL)
Landa, Michal (UT-L) RID
Janovská, Michaela (UT-L) RID, ORCID
Seiner, Hanuš (UT-L) RID, ORCID
Gutman, O. (IL)
Tepper-Faran, T. (IL)
Shilo, D. (IL)Source Title Acta Materialia. Roč. 87, April (2015), s. 321-331. - : Elsevier Document Type Článek v odborném periodiku Grant M100761203, CZ - Czech Republic Institutional support UT-L - RVO:61388998 Language eng Country GB Keywords thin films * mechanical properties * tensile tests * bulge tests * porosity Cooperating institutions Technion–Israel Institute of Technology (Israel)
Microsystems Department, R&D and Technology Center (Israel)URL http://www.sciencedirect.com/science/article/pii/S1359645414009677 Permanent Link http://hdl.handle.net/11104/0244040
Number of the records: 1