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Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning
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SYSNO 0437840 Title Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning Author(s) Meluzín, Petr (UPT-D) RID, ORCID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Urbánek, Michal (UPT-D) RID
Bok, Jan (UPT-D) RID
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Matějka, Milan (UPT-D) RID, ORCID, SAI
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAISource Title NANOCON 2014. 6th International conference proceedings. - Ostrava : TANGER, 2014 Conference NANOCON 2014. International Conference /6./, Brno, 05.11.2014-07.11.2014 Document Type Konferenční příspěvek (zahraniční konf.) Grant LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Language eng Country CZ Keywords e-beam writer * optical nano structures * diffraction gratings * fractal gratings Permanent Link http://hdl.handle.net/11104/0241326
Number of the records: 1