Number of the records: 1

Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam

SYSNO	0437838
Title	Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam
Author(s)	Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Urbánek, Michal (UPT-D)_RID Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Meluzín, Petr (UPT-D)_{RID, ORCID, SAI} Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Chlumská, Jana (UPT-D)_{RID, ORCID, SAI}
Source Title	NANOCON 2014. 6th International conference proceedings. - Ostrava : TANGER, 2014
Conference	NANOCON 2014. International Conference /6./, Brno, 05.11.2014-07.11.2014
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	CZ
Keywords	e-beam writer * Gaussian beam * variable shaped beam
Permanent Link	http://hdl.handle.net/11104/0241322

Number of the records: 1