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Etching of glass microchips with supercritical water

  1. 1.
    SYSNO0434366
    TitleEtching of glass microchips with supercritical water
    Author(s) Karásek, Pavel (UIACH-O) [FPS] RID, ORCID
    Grym, Jakub (UIACH-O) [BAI]
    Roth, Michal (UIACH-O) [FPS] RID, ORCID
    Planeta, Josef (UIACH-O) [FPS] RID, ORCID
    Foret, František (UIACH-O) [BAI] RID, ORCID
    Source Title Lab on a Chip. Roč. 15, č. 1 (2015), s. 311-318. - : Royal Society of Chemistry
    Document TypeČlánek v odborném periodiku
    Grant GAP106/12/0522 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
    GBP206/12/G014 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
    EE2.3.20.0182 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    Institutional supportUIACH-O - RVO:68081715
    Languageeng
    CountryGB
    Keywords glass microchips * channel etching * supercritical water
    Permanent Linkhttp://hdl.handle.net/11104/0238435
    FileDownloadSizeCommentaryVersionAccess
    0434366_IR.pdf105.1 MBAuthor’s postprintrequire
     
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