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Vapor pressures of (3-dimethylaminopropyl)dimethylindium, (t-butylimino)bis(diethylamino)tantalum cyclopentadienylide, and (t-butylimido)tris(ethylmethylamino)tantalum
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SYSNO 0433689 Title Vapor pressures of (3-dimethylaminopropyl)dimethylindium, (t-butylimino)bis(diethylamino)tantalum cyclopentadienylide, and (t-butylimido)tris(ethylmethylamino)tantalum Author(s) Morávek, P. (CZ)
Pangrác, Jiří (FZU-D) RID, ORCID, SAI
Fulem, M. (CZ)
Hulicius, Eduard (FZU-D) RID, ORCID, SAI
Růžička, K. (CZ)Source Title International Conference on Metalorganic Vapor Phase Epitaxy /17./. S. 7-7. - Lausanne : École Polytechnique Fédérale de Lausanne, 2014 / Kapon E. ; Rudra A. Conference International Conference on Metalorganic Vapor Phase Epitaxy /17./, Lausanne, 13.07.2014-18.07.2014 Document Type Abstrakt Institutional support FZU-D - RVO:68378271 Language eng Country CH Keywords metalorganic vapor phase epitaxy * vapor pressure * static method * indium precursors * tantalum precursors Permanent Link http://hdl.handle.net/11104/0237855
Number of the records: 1