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Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam

  1. 1.
    SYSNO0432741
    TitleUltra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam
    Author(s) Dluhoš, J. (CZ)
    Petrenec, M. (CZ)
    Peřina, P. (CZ)
    Reinauer, F. (DE)
    Kopeček, Jaromír (FZU-D) RID, ORCID
    Hrnčíř, T. (CZ)
    Jiruše, J. (CZ)
    Source Title Proceedings of 18th International Microscopy Congress. - Prague : Czechoslovak Microscopy Society, 2014 / Hozák P.
    Conference International Microscopy Congress /18./, Prague, 07.09.2014-12.09.2014
    Document TypeAbstrakt
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    Keywords SEM * FIB * xenon
    Permanent Linkhttp://hdl.handle.net/11104/0237116
     
Number of the records: 1  

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