Growth rate enhancement and morphology engineering of diamond films by adding CO.sub.2./sub. or N.sub.2./sub. in hydrogen rich gas chemistry

Number of the records: 1

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SYSNO	0432636
Title	Growth rate enhancement and morphology engineering of diamond films by adding CO₂ or N₂ in hydrogen rich gas chemistry
Author(s)	Ižák, Tibor (FZU-D)_RID Davydova, Marina (FZU-D)_{RID, ORCID} Varga, Marián (FZU-D)_{RID, ORCID} Potocký, Štěpán (FZU-D)_{RID, ORCID} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Advanced Science, Engineering and Medicine. Roč. 6, č. 7 (2014), s. 749-755
Document Type	Článek v odborném periodiku
Grant	FR-TI2/736 GA MPO - Ministry of Industry and Trade (MPO)
	GAP205/12/0908 GA ČR - Czech Science Foundation (CSF)
	GP14-16549P GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	US
Keywords	microwave plasma CVD * diamond growth * nitrogen * carbon dioxide * growth rate * SEM
Permanent Link	http://hdl.handle.net/11104/0237014

Number of the records: 1