Measurement of coherence properties of scanning electron microscope

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SYSNO	0431335
Title	Measurement of coherence properties of scanning electron microscope
Author(s)	Řiháček, Tomáš (UPT-D)_{RID, ORCID} Lenc, M. (CZ) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID}
Source Title	9th International Conference on Charged Particle Optics. Book of Abstracts. S. 65. - Brno : Institute of Scientific Instruments AS CR, v. v. i, 2014
Conference	International Conference on Charged Parrticle Optics /9./, Brno, 31.08.2014-05.09.2014
Document Type	Abstrakt
Grant	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	CZ
Keywords	coherence * diffraction * scanning electron microscope
Permanent Link	http://hdl.handle.net/11104/0236396

Number of the records: 1