Number of the records: 1  

PEC reliability in 3D e-beam DOE nanopatterning

    1.
    SYSNO0431332
    TitlePEC reliability in 3D e-beam DOE nanopatterning
    Author(s) Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Urbánek, Michal (UPT-D) RID
    Source Title 9th International Conference on Charged Particle Optics. Book of Abstracts. S. 37. - Brno : Institute of Scientific Instruments AS CR, v. v. i, 2014
    Conference International Conference on Charged Parrticle Optics /9./, Brno, 31.08.2014-05.09.2014
    Document TypeAbstrakt
    Grant LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryCZ
    Keywords proximity effect correction * diffractive optical elements
    Permanent Linkhttp://hdl.handle.net/11104/0236392
     
Number of the records: 1  

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