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Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures

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    SYSNO0429463
    TitleVariable shape E-beam writing: proximity effect simulation and correction of binary and relief structures
    Author(s) Urbánek, Michal (UPT-D) RID
    Matějka, Milan (UPT-D) RID, ORCID, SAI
    Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Horáček, Miroslav (UPT-D) RID, ORCID, SAI
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Bok, Jan (UPT-D) RID
    Chlumská, Jana (UPT-D) RID, ORCID, SAI
    Mikšík, P. (CZ)
    Vašina, J. (CZ)
    Source Title 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. S. 582. - Cambridge : University of Cambridge, 2013
    Conference MNE2013. International Conference on Micro and Nano Engineering /39./, London, 16.09.2013-19.09.2013
    Document TypeAbstrakt
    Institutional supportUPT-D - RVO:68081731
    Languageeng
    CountryGB
    Keywords rectangular shaped beam * proximity effect simulation * binary structures and relief structures
    Permanent Linkhttp://hdl.handle.net/11104/0234576
     
Number of the records: 1