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Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures
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SYSNO 0429463 Title Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures Author(s) Urbánek, Michal (UPT-D) RID
Matějka, Milan (UPT-D) RID, ORCID, SAI
Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
Horáček, Miroslav (UPT-D) RID, ORCID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Bok, Jan (UPT-D) RID
Chlumská, Jana (UPT-D) RID, ORCID, SAI
Mikšík, P. (CZ)
Vašina, J. (CZ)Source Title 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. S. 582. - Cambridge : University of Cambridge, 2013 Conference MNE2013. International Conference on Micro and Nano Engineering /39./, London, 16.09.2013-19.09.2013 Document Type Abstrakt Institutional support UPT-D - RVO:68081731 Language eng Country GB Keywords rectangular shaped beam * proximity effect simulation * binary structures and relief structures Permanent Link http://hdl.handle.net/11104/0234576
Number of the records: 1