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Linear antenna microwave surface wave plasma characterization by Langmuir probe

  1. 1.
    SYSNO0424648
    TitleLinear antenna microwave surface wave plasma characterization by Langmuir probe
    Author(s) Potocký, Štěpán (FZU-D) RID, ORCID
    Čada, Martin (FZU-D) RID, ORCID, SAI
    Babchenko, Oleg (FZU-D) RID, ORCID
    Ižák, Tibor (FZU-D) RID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Source Title 4 IC4N (International conference nanoparticles and nanomaterials to nanodevices and nanosystems /4./) Book of Abstracs. S. 132-132. - Arlington : University of Texas, 2013 / Meletis E.I. ; Kanellopoulos N. ; Politis C. ; Schommers W.
    Conference IC4N 2013 International conference from nanoparticles and nanomaterials to nanodevices and nanosystems /4./, Corfu, 16.06.2013-20.06.2013
    Document TypeAbstrakt
    Grant TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
    LM2011026 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    GAP205/12/0908 GA ČR - Czech Science Foundation (CSF)
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountryUS
    Keywords Langmuir probe * nanocrystalline diamond * plasma enhanced CVD * Raman spectroscopy * SEM
    Permanent Linkhttp://hdl.handle.net/11104/0230696
     
Number of the records: 1  

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