Performances of microwave plasma generation in linear antenna configuration

Number of the records: 1

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SYSNO	0424334
Title	Performances of microwave plasma generation in linear antenna configuration
Author(s)	Potocký, Štěpán (FZU-D)_{RID, ORCID} Rezek, Ondřej (FZU-D) Čada, Martin (FZU-D)_{RID, ORCID, SAI} Babchenko, Oleg (FZU-D)_{RID, ORCID} Ižák, Tibor (FZU-D)_RID Varga, Marián (FZU-D)_{RID, ORCID} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies). S. 42-46. - Bratislava : Slovenská vákuová spoločnosť, 2013 / Vojs M. ; Veselý M. ; Vincze A.
Conference	School of Vacuum Technology /16./ (Perspektívne vákuové metódy a technológie. Perspective vacuum methods and technologies), Štrbské Pleso, 10.10.2013-13.10.2013
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	GAP205/12/0908 GA ČR - Czech Science Foundation (CSF)
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	SK
Keywords	microwave plasma * linear antena * CVD deposition
Permanent Link	http://hdl.handle.net/11104/0230415

Number of the records: 1