Number of the records: 1

Praktická elektronová litografie

SYSNO	0423948
Title	Praktická elektronová litografie
Title	Practical E-Beam Lithography
Author(s)	Matějka, František (UPT-D)_{RID, SAI}
Issue data	Brno: Ústav přístrojové techniky AV ČR, v. v. i, 2013
ISBN	978-80-87441-04-6
Document Type	Monografie, kniha (jako celek)
Grant	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Language	cze
Country	CZ
Keywords	e-beam lithography * e-beam resist * e-beam exposure
Permanent Link	http://hdl.handle.net/11104/0229992

Number of the records: 1