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Structuring of diamond films by reactive ion plasma etching

  1. 1.
    SYSNO0389420
    TitleStructuring of diamond films by reactive ion plasma etching
    Author(s) Domonkos, M. (CZ)
    Ižák, Tibor (FZU-D) RID
    Proška, J. (CZ)
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Source Title Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012). S. 35-40. - Praha : ČVUT, 2012 / Rácová Z. ; Tesárek P. ; Nežerka V. ; Ryparová P.
    Conference Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012), Praha, 11.09.2012-11.09.2012
    Document TypeKonferenční příspěvek (tuzemská konf.)
    Grant GAP108/12/0910 GA ČR - Czech Science Foundation (CSF)
    GAP108/11/0794 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
    IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic
    CEZAV0Z10100521 - FZU-D (2005-2011)
    Languageeng
    CountryCZ
    Keywords nanostructuring * diamond thin films * reactive ion etching * scanning electron microscopy
    Permanent Linkhttp://hdl.handle.net/11104/0218280
     
Number of the records: 1  

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