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Structuring of diamond films by reactive ion plasma etching
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SYSNO 0389420 Title Structuring of diamond films by reactive ion plasma etching Author(s) Domonkos, M. (CZ)
Ižák, Tibor (FZU-D) RID
Proška, J. (CZ)
Kromka, Alexander (FZU-D) RID, ORCID, SAISource Title Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012). S. 35-40. - Praha : ČVUT, 2012 / Rácová Z. ; Tesárek P. ; Nežerka V. ; Ryparová P. Conference Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012), Praha, 11.09.2012-11.09.2012 Document Type Konferenční příspěvek (tuzemská konf.) Grant GAP108/12/0910 GA ČR - Czech Science Foundation (CSF) GAP108/11/0794 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic CEZ AV0Z10100521 - FZU-D (2005-2011) Language eng Country CZ Keywords nanostructuring * diamond thin films * reactive ion etching * scanning electron microscopy Permanent Link http://hdl.handle.net/11104/0218280
Number of the records: 1