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Influence of CO.sub.2./sub. concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system

  1. 1.
    SYSNO0375441
    TitleInfluence of CO2 concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system
    Author(s) Domonkos, M. (CZ)
    Ižák, Tibor (FZU-D) RID
    Babchenko, Oleg (FZU-D) RID, ORCID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Hruška, Karel (FZU-D) RID, ORCID
    Source Title Proceedings of the 2nd Winter Education Seminar. S. 33-37. - Praha : FZÚ AV ČR, 2011 / Remeš Z. ; Kromka A. ; Ledinský M.
    Conference Winter educational seminar /2./, Rokytnice n. J., 16.02.2011-18.02.2011
    Document TypeKonferenční příspěvek (tuzemská konf.)
    Grant MEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic
    MEB0810081 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    CEZAV0Z10100521 - FZU-D (2005-2011)
    Languageeng
    CountryCZ
    Keywords nanocrystalline diamond * large area growth * growth rate * CO2 addition * SEM * Raman Spectroscopy
    Permanent Linkhttp://hdl.handle.net/11104/0208091
     
Number of the records: 1  

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