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Influence of CO.sub.2./sub. concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system

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    SYSNO0375441
    TitleInfluence of CO2 concentration on diamond film morphology in pulsed linear antenna microwave plasma CVD system
    Author(s) Domonkos, M. (CZ)
    Ižák, Tibor (FZU-D) RID
    Babchenko, Oleg (FZU-D) RID, ORCID
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Hruška, Karel (FZU-D) RID, ORCID
    Source Title Proceedings of the 2nd Winter Education Seminar. S. 33-37. - Praha : FZÚ AV ČR, 2011 / Remeš Z. ; Kromka A. ; Ledinský M.
    Conference Winter educational seminar /2./, Rokytnice n. J., 16.02.2011-18.02.2011
    Document TypeKonferenční příspěvek (tuzemská konf.)
    Grant MEB0810082 GA MŠk - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic
    MEB0810081 GA MŠk - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
    CEZAV0Z10100521 - FZU-D (2005-2011)
    Languageeng
    CountryCZ
    Keywords nanocrystalline diamond * large area growth * growth rate * CO2 addition * SEM * Raman Spectroscopy
    Permanent Linkhttp://hdl.handle.net/11104/0208091
     
Number of the records: 1