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AFM nanometrology interferometric system with the compensation of angle errors
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SYSNO 0367516 Title AFM nanometrology interferometric system with the compensation of angle errors Author(s) Hrabina, Jan (UPT-D) RID, ORCID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Klapetek, P. (CZ)
Číp, Ondřej (UPT-D) RID, SAI, ORCIDSource Title Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082). 80823U:1-6. - Bellingham : SPIE, 2011 Conference Optical Measurement Systems for Industrial Inspection VII, Munich, 23.05.2011-26.05.2011 Document Type Konferenční příspěvek (zahraniční konf.) Grant LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country US Keywords atomic force microscopy (AFM) * nanometrology * nanoscale * nanopositioning * interferometry * abbe errors Permanent Link http://hdl.handle.net/11104/0202169
Number of the records: 1