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Multidimensional interferometric tool for the local probe microscopy nanometrology

SYSNO	0366031
Title	Multidimensional interferometric tool for the local probe microscopy nanometrology
Author(s)	Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Klapetek, P. (CZ) Číp, Ondřej (UPT-D)_{RID, SAI, ORCID}
Source Title	Measurement Science and Technology. Roč. 22, č. 9 (2011), 094030:1-8. - : Institute of Physics Publishing
Document Type	Článek v odborném periodiku
Grant	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	GB
Keywords	atomic force microscopy (AFM) * nanometrology * nanopositioning interferometry * nanoscale
Permanent Link	http://hdl.handle.net/11104/0201133

Number of the records: 1