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FIB Induced Damage Examined with the Low Energy SEM

SYSNO	0365942
Title	FIB Induced Damage Examined with the Low Energy SEM
Author(s)	Mikmeková, Šárka (UPT-D)_{RID, SAI, ORCID} Matsuda, K. (JP) Watanabe, K. (JP) Ikeno, S. (JP) Müllerová, Ilona (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Materials Transactions. Roč. 52, č. 3 (2011), s. 292-296. - : Japan Institute of Metals and Materials
Document Type	Článek v odborném periodiku
Grant	OE08012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	JP
Keywords	scanning low energy electron microscopy * focused ion beam * beam induced damage * sputtering
Permanent Link	http://hdl.handle.net/11104/0201068

Number of the records: 1