Number of the records: 1

Optical characterization of HfO(2) thin films

SYSNO	0365941
Title	Optical characterization of HfO(2) thin films
Author(s)	Franta, D. (CZ) Ohlídal, I. (CZ) Nečas, D. (CZ) Vižďa, F. (CZ) Caha, O. (CZ) Hasoň, M. (CZ) Pokorný, Pavel (UPT-D)_{RID, SAI, ORCID}
Source Title	Thin Solid Films. Roč. 519, č. 18 (2011), s. 6085-6091. - : Elsevier
Document Type	Článek v odborném periodiku
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	CH
Keywords	optical properties * ellipsometry * spectrophotometry * hafnium oxide * transition-metal oxide * Urbach tail
Permanent Link	http://hdl.handle.net/11104/0201067

Number of the records: 1