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Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere

SYSNO	0364640
Title	Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere
Author(s)	Čada, Martin (FZU-D)_{RID, ORCID, SAI} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Adámek, Petr (FZU-D)_{RID, ORCID} Klusoň, Jan (FZU-D) Jastrabík, Lubomír (FZU-D)_{RID, ORCID}
Source Title	Surface and Coatings Technology. Roč. 205, č. 2 (2011), S317-S321. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	GP202/09/P159 GA ČR - Czech Science Foundation (CSF)
	KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	KAN400720701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA202/09/0800 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	CH
Keywords	HiPIMS * Langmuir probe * ion flux * reactive sputtering
Permanent Link	http://hdl.handle.net/11104/0200073

Number of the records: 1