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Mechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges

    1.
    SYSNO0359836
    TitleMechanical properties of ultrananocryslalline thin films deposited using dual frequency discharges
    Author(s) Buršíková, V. (CZ)
    Bláhová, O. (CZ)
    Karásková, M. (CZ)
    Zajíčková, L. (CZ)
    Jašek, O. (CZ)
    Franta, D. (CZ)
    Klapetek, P. (CZ)
    Buršík, Jiří (UFM-A) RID, ORCID
    Source Title Chemické listy. Roč. 105, - (2011), s. 98-101. - : Česká společnost chemická
    Conference Lokální mechanické vlastnosti ´07, Brno, 07.11.2007-09.11.2007
    Document TypeČlánek v odborném periodiku
    CEZAV0Z20410507 - UFM-A (2005-2011)
    Languageeng
    CountryCZ
    Keywords ultrananocryslalline diamond * plasma enhanced chemical vapor deposition * dual frequency discharge
    Permanent Linkhttp://hdl.handle.net/11104/0197542
     
Number of the records: 1  

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