Number of the records: 1

Correction of sample tilt in FIB instruments

SYSNO	0358590
Title	Correction of sample tilt in FIB instruments
Author(s)	Oral, Martin (UPT-D)_{RID, ORCID, SAI} Lencová, Bohumila (UPT-D)_{RID, SAI}
Source Title	Nuclear Instruments & Methods in Physics Research Section A. Roč. 645, č. 1 (2011), s. 130-135. - : Elsevier
Document Type	Článek v odborném periodiku
Grant	IAA100650805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	NL
Keywords	sample tilt * extraction field * correction of elliptical beam shape * calculation of intensity distribution * focused ion beams
Permanent Link	http://hdl.handle.net/11104/0196576

Number of the records: 1