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Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films
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SYSNO 0357100 Title Time-resolved investigation of dual high power impulse magnetronsputtering with closed magnetic field during deposition of Ti–Cu thin films Author(s) Straňák, Vítězslav (FZU-D) RID, ORCID
Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Tichý, M. (CZ)
Hippler, R. (DE)Source Title Journal of Applied Physics. Roč. 108, č. 4 (2010), 043305/1-043305/8. - : AIP Publishing Document Type Článek v odborném periodiku Grant KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic M100100915, CZ - Czech Republic GA202/09/0800 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country US Keywords Langmuir probes * magnetrons * metallic thin films * plasma density * sputter deposition * time resolved spectra URL http://jap.aip.org/resource/1/japiau/v108/i4/p043305_s1 Permanent Link http://hdl.handle.net/11104/0195448
Number of the records: 1