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Comparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth

  1. 1.
    SYSNO0355161
    TitleComparison between chemical and plasmatic treatment of seeding layer for patterned diamond growth
    Author(s) Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Babchenko, Oleg (FZU-D) RID, ORCID
    Rezek, Bohuslav (FZU-D) RID, ORCID
    Hruška, Karel (FZU-D) RID, ORCID
    Purkrt, A. (CZ)
    Remeš, Zdeněk (FZU-D) RID, ORCID
    Source Title Diamond Electronics and Bioelectronics - Fundamentals to Applications III. S. 137-143. - Warrendale, PA : Materials Research Society, 2010 / Bergonzo P. ; Butler J.E. ; Jackman R.B. ; Loh K.P. ; Nesladek M.
    Conference MRS Fall Meeting 2009, Boston, 30.11.2009-04.12.2009
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant LC510 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic
    KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    KAN400480701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR), CZ - Czech Republic
    CEZAV0Z10100521 - FZU-D (2005-2011)
    Languageeng
    CountryUS
    Keywords diamond * plasma-enhanced CVD (PECVD) (deposition) * microstructure
    URLhttp://dx.doi.org/10.1557/PROC-1203-J17-53
    Permanent Linkhttp://hdl.handle.net/11104/0193993
     
Number of the records: 1  

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