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Effect of Hydrogen on the Properties of Amorphous Carbon Nitride Films

    1.
    SYSNO0352948
    TitleEffect of Hydrogen on the Properties of Amorphous Carbon Nitride Films
    Author(s) Mikmeková, Eliška (UPT-D) RID
    Urbánek, Michal (UPT-D) RID
    Fořt, Tomáš (UPT-D) RID, ORCID, SAI
    Di Mundo, R. (IT)
    Source Title 2010 International Conference on Manufacturing Science and Technology (ICMST 2010). S. 291-295. - Chengdu : Institute of Electrical and Electronics Engineers, Inc, 2010
    Conference International Conference on Manufacturing Science and Technology - ICMST 2010, Kuala Lumpur, 26.11.2010-28.11.2010
    Document TypeKonferenční příspěvek (zahraniční konf.)
    CEZAV0Z20650511 - UPT-D (2005-2011)
    Languageeng
    CountryCN
    Keywords hydrogenated alfa-CNx films * ressidal stress * r. f. magnetron sputtering * SLEEM * XPS * TDMS * AFM
    Permanent Linkhttp://hdl.handle.net/11104/0192321
     
Number of the records: 1  

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