Number of the records: 1

Mapping of Dopants in Silicon by Injection of Electrons

SYSNO	0352508
Title	Mapping of Dopants in Silicon by Injection of Electrons
Author(s)	Hovorka, Miloš (UPT-D) Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of 5th Japan-China-Norway Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology. S. 15-18. - Toyama : University of Toyama, 2010
Conference	JCNCS2010 /5./ Japan-China-Norway Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology, Toyama, 12.09.2010-15.09.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	JP
Keywords	semiconductors * dopant contrast * very low energy SEM
Permanent Link	http://hdl.handle.net/11104/0192000

Number of the records: 1