Number of the records: 1

Interferometric nanocomparator for calibrating precision displacement sensors

SYSNO	0352218
Title	Interferometric nanocomparator for calibrating precision displacement sensors
Author(s)	Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Buchta, Zdeněk (UPT-D)_{RID, SAI, ORCID} Mikel, Břetislav (UPT-D)_{RID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID}
Source Title	Interferometry XV: Applications (Proceedings of SPIE Vol. 7791). 77910N: 1-7. - Bellingham : SPIE, 2010
Conference	Interferometry /15./, San Diego, 02.08.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	US
Keywords	interferometry * nanometrology * calibration
Permanent Link	http://hdl.handle.net/11104/0191782

Number of the records: 1