Number of the records: 1

Laser interference nano-comparator for length sensor calibration in nanometric scale

SYSNO	0352200
Title	Laser interference nano-comparator for length sensor calibration in nanometric scale
Author(s)	Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Mikel, Břetislav (UPT-D)_{RID, SAI} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Šmíd, Radek (UPT-D)_{RID, SAI} Buchta, Zdeněk (UPT-D)_{RID, SAI, ORCID} Lazar, Josef (UPT-D)_{RID, ORCID, SAI}
Source Title	2nd International Conference NANOCON 2010. S. 274-277. - Ostrava : Tanger s.r.o, 2010
Conference	NANOCON 2010. International Conference /2./, Olomouc, 12.10.2010-14.10.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	FR-TI1/241 GA MPO - Ministry of Industry and Trade (MPO)
	GAP102/10/1813 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	CZ
Keywords	nanoscale * precise measurement * laser * interferometer
Permanent Link	http://hdl.handle.net/11104/0191769

Number of the records: 1