Number of the records: 1

Interferometer Controlled Positioning for Nanometrology

SYSNO	0352196
Title	Interferometer Controlled Positioning for Nanometrology
Author(s)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Šerý, Mojmír (UPT-D)_{RID, SAI}
Source Title	Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications. 525: 1-5. - Ottawa : International ASET, 2010
Conference	Nanotechnology: Fundamentals and Applications, Ottawa, 04.08.2010-06.08.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	FR-TI1/241 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	CA
Keywords	atomic force microscopy * interferometer controlled positioning
Permanent Link	http://hdl.handle.net/11104/0191766

Number of the records: 1