Laser Source for Interferometry in Nanometrology

Number of the records: 1

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SYSNO	0352194
Title	Laser Source for Interferometry in Nanometrology
Author(s)	Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI}
Source Title	Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications. 541: 1-6. - Ottawa : International ASET, 2010
Conference	Nanotechnology: Fundamentals and Applications, Ottawa, 04.08.2010-06.08.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO)
	FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO)
	2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/09/1276 GA ČR - Czech Science Foundation (CSF)
	GA102/07/1179 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	CA
Keywords	nanometrology * AFM microscopy * interferometry
Permanent Link	http://hdl.handle.net/11104/0191764

Number of the records: 1