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Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth
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SYSNO 0351617 Title Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Author(s) Novotný, Michal (FZU-D) RID, ORCID, SAI
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Lančok, Ján (FZU-D) RID, ORCID
Pokorný, Petr (FZU-D) RID, ORCID, SAI
Bodnár, Michal (FZU-D)
Piksová, K. (CZ)Source Title Nanostructured Thin Films III. 7766OU/1-7766OU/8. - Bellingham : SPIE, 2010 / Martin-Palma R.J. ; Jen Y.-J. ; Lakhtakia A. Conference Nanostructured Thin Films III, San Diego, 04.08.2010-05.08.2010 Document Type Konferenční příspěvek (zahraniční konf.) Grant IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN400100653 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P324 GA ČR - Czech Science Foundation (CSF) IAA100100729 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country US Keywords aluminium ultra thin film * magnetron sputtering * in-situ monitoring * electrical conductivity * spectral ellipsometry * optical emission spectroscopy URL http://dx.doi.org/10.1117/12.860555 Permanent Link http://hdl.handle.net/11104/0191329
Number of the records: 1