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Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina
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SYSNO 0351378 Title Generation of positive and negative oxygen ions in magnetron discharge during reactive sputtering of alumina Author(s) Pokorný, Petr (FZU-D) RID, ORCID, SAI
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Lančok, Ján (FZU-D) RID, ORCID
Musil, Jindřich (FZU-D) RID, ORCID
Novotný, Michal (FZU-D) RID, ORCID, SAISource Title Plasma Processes and Polymers. Roč. 7, č. 11 (2010), s. 910-914. - : Wiley Document Type Článek v odborném periodiku Grant IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) KAN400100653 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P324 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country DE Keywords aluminium oxide * ion-energy distribution function * magnetron * mass spectrometry * pulsed discharges Permanent Link http://hdl.handle.net/11104/0191144
Number of the records: 1