Number of the records: 1

Imaging of dopants under presence of surface ad-layers

SYSNO	0350664
Title	Imaging of dopants under presence of surface ad-layers
Author(s)	Mika, Filip (UPT-D)_{RID, SAI, ORCID} Hovorka, Miloš (UPT-D) Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. S. 35-36. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F.
Conference	International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr, 31.05.2010-04.06.2010
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	GP102/09/P543 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	CZ
Keywords	scanning electron microscopy * semiconductor structures * image contrast * dopant concentration * secondary electron emission
Permanent Link	http://hdl.handle.net/11104/0190604

Number of the records: 1