Number of the records: 1
Comparison of techniques for diffraction grating topography analysis
- 1.
SYSNO 0350662 Title Comparison of techniques for diffraction grating topography analysis Author(s) Matějka, Milan (UPT-D) RID, ORCID, SAI
Rek, Antonín (UPT-D) RID
Mika, Filip (UPT-D) RID, SAI, ORCID
Fořt, Tomáš (UPT-D) RID, ORCID, SAI
Matějková, Jiřina (UPT-D)Source Title Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. S. 29-32. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2010 / Mika F. Conference International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /12./, Skalský dvůr, 31.05.2010-04.06.2010 Document Type Konferenční příspěvek (zahraniční konf.) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country CZ Keywords Atomic Force Microscopy * AEM * Scanning Electron Microscopy * SEM * topography imaging Permanent Link http://hdl.handle.net/11104/0190602
Number of the records: 1