Number of the records: 1
Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge
- 1.
SYSNO 0348989 Title Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge Author(s) Trunec, D. (CZ)
Zajíčková, L. (CZ)
Bursíková, V. (CZ)
Studnička, F. (CZ)
Sťahel, P. (CZ)
Prysiazhnyi, V. (CZ)
Peřina, Vratislav (UJF-V) [ONF] RID
Houdková, Jana (FZU-D) RID, ORCID
Navrátil, Z. (CZ)
Franta, D. (CZ)Source Title Journal of Physics D-Applied Physics. Roč. 43, č. 22 (2010), 225403/1-225403/8. - : Institute of Physics Publishing Document Type Článek v odborném periodiku CEZ AV0Z10480505 - UJF-V (2005-2011) AV0Z10100521 - FZU-D (2005-2011) Language eng Country GB Keywords GLOW-DISCHARGE * CHEMICAL-STRUCTURE * PLASMA Permanent Link http://hdl.handle.net/11104/0189349
Number of the records: 1