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Laser Induced Breakdown Spectroscopy of Germane Plasma Induced by IR CO2 Pulsed Laser

  1. 1.
    SYSNO0345105
    TitleLaser Induced Breakdown Spectroscopy of Germane Plasma Induced by IR CO2 Pulsed Laser
    Author(s) Santos, M. (ES)
    Diaz, L. (ES)
    Camacho, J.J. (ES)
    Poyato, J.M. (ES)
    Pola, Josef (UCHP-M) RID, ORCID, SAI
    Křenek, Tomáš (UCHP-M)
    Source Title Applied Physics A - Materials Science & Processing. Roč. 88, č. 4 (2010), s. 811-821. - : Springer
    Document TypeČlánek v odborném periodiku
    GrantMEC:CTQ2008-05393, ES - Spain
    MEC:CTQ2007-60177, ES - Spain
    CEZAV0Z40720504 - UCHP-M (2005-2011)
    Languageeng
    CountryDE
    Keywords laser breakdown spectroscopy * germane * gas-breadown
    Permanent Linkhttp://hdl.handle.net/11104/0005943
     
Number of the records: 1  

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