Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide

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SYSNO	0343204
Title	Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide
Author(s)	Novotný, Michal (FZU-D)_{RID, ORCID, SAI} Bulíř, Jiří (FZU-D)_{RID, ORCID, SAI} Pokorný, Petr (FZU-D)_{RID, ORCID, SAI} Bočan, Jiří (FZU-D)_RID Fitl, Přemysl (FZU-D)_{RID, ORCID} Lančok, Ján (FZU-D)_{RID, ORCID} Musil, Jindřich (FZU-D)_{RID, ORCID}
Source Title	Journal of Optoelectronics and Advanced Materials. Roč. 12, č. 3 (2010), 697-700. - : NATL INST OPTOELECTRONICS
Document Type	Článek v odborném periodiku
Grant	IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	KAN400100653 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	GP202/09/P324 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	RO
Keywords	reactive magnetron sputtering * alumina * plasma spectroscopy * mass spectroscopy * optical emission spectroscopy
Permanent Link	http://hdl.handle.net/11104/0005901

Number of the records: 1