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On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films
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SYSNO 0341419 Title On angle resolved RF magnetron sputtering of Ge-Sb-Te thin films Author(s) Gutwirth, J. (CZ)
Wágner, T. (CZ)
Bezdička, Petr (UACH-T) [CIT] SAI, RID, ORCID
Hrdlička, M. (CZ)
Vlček, Milan (UMCH-V) [OPTOEL] RID, ORCID
Frumar, M. (CZ)Source Title Journal of Non-Crystalline Solids. Roč. 355, 37-42 (2009), s. 1935-1938. - : Elsevier Document Type Článek v odborném periodiku Grant LC523 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA203/06/1368 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z40320502 - UACH-T (2005-2011) AV0Z40500505 - UMCH-V (2005-2011) Language eng Country NL Keywords amorphous semiconductors * films and coatings * sputtering Permanent Link http://hdl.handle.net/11104/0184416
Number of the records: 1