Profiling N-Type Dopants in Silicon

Number of the records: 1

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SYSNO	0340745
Title	Profiling N-Type Dopants in Silicon
Author(s)	Hovorka, Miloš (UPT-D) Mika, Filip (UPT-D)_{RID, SAI, ORCID} Mikulík, P. (CZ) Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	Materials Transactions. Roč. 51, č. 2 (2010), s. 237-242. - : Japan Institute of Metals and Materials
Document Type	Článek v odborném periodiku
Grant	GP102/09/P543 GA ČR - Czech Science Foundation (CSF)
	IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	JP
Keywords	silicon * dopant contrast * photoemission electron microscopy * scanning electron microscopy
URL	http://www.jim.or.jp/journal/e/51/02/237.html
Permanent Link	http://hdl.handle.net/11104/0183926

Number of the records: 1