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Deposition of PZT thin films on copper-coated polymer foils

  1. 1.
    SYSNO0337271
    TitleDeposition of PZT thin films on copper-coated polymer foils
    TitleDepozice PZT tenkých vrstev na poměděné polymerové folie
    Author(s) Suchaneck, G. (DE)
    Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Dejneka, Alexandr (FZU-D) RID, ORCID
    Kiselev, D. (PT)
    Bdikin, I. (PT)
    Kholkin, A. (PT)
    Gerlach, G. (DE)
    Source Title Relability and Properties of Electronic Devices on Flexible Substrates (Simposium I at the 2008 MRS Fall Meeting). I0305/1-I0305/2. - Warrendale, PA : MRS, 2009 / Greer J.R. ; Vlassak J. ; Daniel J. ; Tsui T.
    Conference Materials Research Society Fall Meeting, Boston, 01.12.2008-05.12.2008
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant GA202/08/1009 GA ČR - Czech Science Foundation (CSF)
    KJB100100703 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    CEZAV0Z10100522 - FZU-D (2005-2011)
    Languageeng
    CountryUS
    Keywords PZT on polymer-foils * RF-modulated plasma jet system
    URLhttp://www.proceedings.com/06086.html
    Permanent Linkhttp://hdl.handle.net/11104/0181303
     
Number of the records: 1  

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