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Metrological SPM with positioning controlled by green light interferometry
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SYSNO 0335626 Title Metrological SPM with positioning controlled by green light interferometry Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Klapetek, P. (CZ)
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Šerý, Mojmír (UPT-D) RID, SAISource Title Fringe 2009 - 6th International Workshop on Advanced Optical Metrology. S. 405-410. - Heidelberg : Springer, 2009 Conference Fringe 2009 - International Workshop on Advanced Optical Metrology /6./, Nürtinger, 13.09.2009-16.09.2009 Document Type Konferenční příspěvek (zahraniční konf.) Grant LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country DE Keywords laser interferometry * Nd:YAG laser Permanent Link http://hdl.handle.net/11104/0180037
Number of the records: 1