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Profiling of N-Type Dopants in Silicon Based Structures
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SYSNO 0335293 Title Profiling of N-Type Dopants in Silicon Based Structures Author(s) Hovorka, Miloš (UPT-D)
Mika, Filip (UPT-D) RID, SAI, ORCID
Frank, Luděk (UPT-D) RID, SAI, ORCID
Mikulík, P. (CZ)Source Title Proceedings of the 4th Czech-Japan-China Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology (CJCS’09). S. 14. - Brno : ISI AS CR, 2009 / Pokorná Zuzana ; Mika Filip Conference CJCS’09 - Czech-Japan-China Cooperative Symposium on Nanostructure of Advanced Materials and Nanotechnology /4./, Brno, 10.08.2009-14.08.2009 Document Type Konferenční příspěvek (zahraniční konf.) Grant GP102/09/P543 GA ČR - Czech Science Foundation (CSF) IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country CZ Keywords n-type substrate * SEM * PEEM * doping levels Permanent Link http://hdl.handle.net/11104/0179799
Number of the records: 1