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Electron beam induced current measurement on a specimen biased in a cathode lens

  1. 1.
    SYSNO0335265
    TitleElectron beam induced current measurement on a specimen biased in a cathode lens
    Author(s) Horáček, Miroslav (UPT-D) RID, ORCID, SAI
    Zobač, Martin (UPT-D) RID, ORCID
    Vlček, Ivan (UPT-D) RID, ORCID, SAI
    Source Title MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Vol. 1: 211-212. - Graz : Verlag der Technischen Universität, 2009
    Conference MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./, Graz, 30.08.2009-04.09.2009
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
    CEZAV0Z20650511 - UPT-D (2005-2011)
    Languageeng
    CountryAT
    Keywords elektron beam induced current * SEM * very low energy electrons * cathode lens * specimen bias
    URL http://www.univie.ac.at/asem/Graz_MC_09/papers/77645.pdf
    Permanent Linkhttp://hdl.handle.net/11104/0179775
     
Number of the records: 1  

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