Number of the records: 1

Profiling of N-type dopants in silicon structures

SYSNO	0335261
Title	Profiling of N-type dopants in silicon structures
Author(s)	Hovorka, Miloš (UPT-D) Mika, Filip (UPT-D)_{RID, SAI, ORCID} Frank, Luděk (UPT-D)_{RID, SAI, ORCID}
Source Title	MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy. Vol. 1: 181-182. - Graz : Verlag der Technischen Universität, 2009
Conference	MC 2009 - Joint Meeting of Dreiländertagung and Multinational Congress on Microscopy /9./, Graz, 30.08.2009-04.09.2009
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	GP102/09/P543 GA ČR - Czech Science Foundation (CSF)
	IAA100650803 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	AT
Keywords	silicon * dopants * PEEM * SEM
URL	http://www.univie.ac.at/asem/Graz_MC_09/papers/19923.pdf
Permanent Link	http://hdl.handle.net/11104/0179772

Number of the records: 1