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Novel instrumentation for interferometric nanoscale comparator
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SYSNO 0335088 Title Novel instrumentation for interferometric nanoscale comparator Author(s) Čížek, Martin (UPT-D) RID, ORCID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCID
Mikel, Břetislav (UPT-D) RID, SAI
Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCIDSource Title Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389). 73982Y: 1-7. - Bellingham : SPIE, 2009 Conference Optical Measurement Systems for Industrial Inspection /6./, Munich, 14.06.2009-18.06.2009 Document Type Konferenční příspěvek (zahraniční konf.) Grant GA102/09/1276 GA ČR - Czech Science Foundation (CSF) LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic 2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO) FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO) 2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO) GA102/07/1179 GA ČR - Czech Science Foundation (CSF) GP102/09/P630 GA ČR - Czech Science Foundation (CSF) KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z20650511 - UPT-D (2005-2011) Language eng Country US Keywords high resolution interferometry * laser comparator * precision displacement sensors Permanent Link http://hdl.handle.net/11104/0179660
Number of the records: 1