Number of the records: 1

Deposition of SiC thin films using pulsed sputtering of a hollow cathode

SYSNO	0331189
Title	Deposition of SiC thin films using pulsed sputtering of a hollow cathode
Title	Depozice SiC tenkých vrstev pomocí pulzního rozprašování duté katody
Author(s)	Soukup, R. J. (US) Ianno, N.J. (US) Huguenin-Love, J.L. (US) Lauer, N.T. (US) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Source Title	Journal of Materials Science and Engineering. Roč. 3, č. 8 (2009), s. 1-4
Document Type	Článek v odborném periodiku
Grant	1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
CEZ	AV0Z10100522 - FZU-D (2005-2011)
Language	eng
Country	US
Keywords	hollow cathode * pulsed sputtering * 4H SiC
Permanent Link	http://hdl.handle.net/11104/0176779

Number of the records: 1