Local probe microscopy with interferometric monitoring of the stage nanopositioning

Number of the records: 1

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SYSNO	0330674
Title	Local probe microscopy with interferometric monitoring of the stage nanopositioning
Author(s)	Lazar, Josef (UPT-D)_{RID, ORCID, SAI} Klapetek, P. (CZ) Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Čížek, Martin (UPT-D)_{RID, ORCID, SAI} Šerý, Mojmír (UPT-D)_{RID, SAI}
Source Title	Measurement Science and Technology. Roč. 20, č. 8 (2009), 084007: 1-6. - : Institute of Physics Publishing
Document Type	Článek v odborném periodiku
Grant	IAA200650504 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR)
	2C06012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	2A-1TP1/127 GA MPO - Ministry of Industry and Trade (MPO)
	FT-TA3/133 GA MPO - Ministry of Industry and Trade (MPO)
	2A-3TP1/113 GA MPO - Ministry of Industry and Trade (MPO)
	GA102/07/1179 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z20650511 - UPT-D (2005-2011)
Language	eng
Country	GB
Keywords	interferometry * local probe microscopy * nanometrology * nanoscale * surface probe microscopy (SPM) * atomic force microscopy (AFM) * nanopositioning interferometry
Permanent Link	http://hdl.handle.net/11104/0176405

Number of the records: 1